Namely, for the development of production in Russia of single—crystal calcium fluoride ingots for optical elements of ultraviolet photolithography for 1.6 billion rubles and single crystals of terbium scandium lutetium aluminum garnet for 400 million rubles.
The first is used in the manufacture of optical elements of excimer lasers with a wavelength of 193 nm, which are part of high-resolution photolithographic installations that ensure the production of electronic component base (ECB) products with a topological norm of 90 nm and below.
Currently, such materials are not supplied to us. It is produced by Nikon (Japan), Corning (USA) and Hellma (Germany). And the ingots that are produced in our country are significantly below the modern world level. For this reason, it is not possible to develop and manufacture advanced domestic photolithographic installations.
Single crystals of terbium scandium lutetium aluminum garnet are needed for the manufacture of a polarizing optical insulator (Faraday cell), an element of laser systems that transmits light in only one direction. The production of such a material will ensure the creation of modern domestic laser systems.
The Ministry of Industry and Trade is silent on why it made such a decision.
But experts are sure that this is due to a reduction in funding. The Ministry of Industry itself said that we lack 33.1 billion rubles for the development, including microelectronics. The industry has already begun to underfund in 2024, so some of the work has been postponed.
We really hope that money will be scraped together for these works.
